一种应用正态分布理论的直线超声电机精密定位控制方法.pdfVIP

第32 卷 第27 期 中 国 电 机 工 程 学 报 Vol.32 No.27 Sep.25, 2012 60 2012 年9 月25 日 Proceedings of the CSEE ©2012 Chin.Soc.for Elec.Eng. 文章编号：0258-8013 (2012) 27-0060-06 中图分类号：TP 242 文献标志码：A 学科分类号：470·40 一种应用正态分布理论的 直线超声电机精密定位控制方法 周丽平，孙志峻，张泉，郭语 (南京航空航天大学机械结构力学及控制国家重点实验室，江苏省 南京市 210016) A Precision Alignment Control Method of Linear Ultrasonic Motors Using the Normal Distribution Theory ZHOU Liping, SUN Zhijun, ZHANG Quan, GUO Yu (State Key Laboratory of Mechanics and Control of Mechanical Structures (Nanjing University of Aeronautics and Astronautics), Nanjing 210016, Jiangsu Province, China) ABSTRACT: Linear ultrasonic motors (LUSM), which are 关键词：直线超声电机；定位平台；宏微驱动；大行程；精 widely applied in the field of precision driving, possess the 密定位 characteristics of a highly non-linearity, time-varying, and 0 引言 complex dynamic model. According to these properties, combined with the technology of fuzzy logic approach, a new 近年来，随着微/纳米技术的快速发展，在光学 control method based on the statistics of the relationship 工程、微电子制造、航空航天、超精密机械制造等 between the diving voltage and the velocity/displacement of 技术领域都迫切需要微/纳米级的超精密驱动器。传 the LUSM using the normal distribution theory is supposed to 统电磁电机由于传动系统复杂、功率–重量比低等 achieve the precision driving of LUSM. The performance of 原因已不能满足工业领域发展的需要。 the supposed method is verified by conducting an experiment 相比传统电磁电机，直线超声电机具有较大的 on a LUSM actuated manipulator. The macro-micro control