基于滑模轮廓控制器的直线电机精密运动平台轨迹跟踪控制.pdfVIP

第 35 卷 第 23 期 中 国 电 机 工 程 学 报 Vol.35 No.23 Dec.5, 2015 6188 2015 年 12 月 5 日 Proceedings of the CSEE ©2015 Chin.Soc.for Elec.Eng. DOI ：10.13334/j.0258-8013.pcsee.2015.23.027 文章编号：0258-8013 (2015) 23-6188-06 中图分类号：TP 273 基于滑模轮廓控制器的直线电机精密运动 平台轨迹跟踪控制 武志涛，朱连成 (辽宁科技大学电子与信息工程学院，辽宁省 鞍山市 114051) Trajectory Tracking Control for the Motion Table Driven by Linear Motors Based on Sliding Mode Contour Tracking Controllers WU Zhitao, ZHU Liancheng (School of Electrics and Information Engineering, University of Science and Technology Liaoning, Anshan 114051, Liaoning Province, China) ABSTRACT: For the poor robustness of direct drive X -Y servo 关键词：永磁直线同步电机；轮廓误差控制；位置控制器； systems in the nonlinear track processing, a method combining 轮廓跟踪控制；等效误差 the position controller based on frequency domain optimization and the ultra spiral sliding mode contour tracking controller 0 引言 was proposed to ensure the robustness of control system. By 随着高速精密加工技术的迅速发展，先进制造 choosing the equivalence error as state variables to design the contour controller, the problem of outline error precision was 技术对数控系统提出了更高的要求。高速、高精度 transformed into the stabilization of equivalence errors. A [1] 已经成为现代加工技术的发展方向 。轮廓误差是 position controller was designed by using the method of 衡量加工质量的重要指标，提高直驱伺服系统的鲁 frequency domain factor decomposition in the quadratic 棒性也已成为亟待研究和解决的问题之一[2-3] 。 optimization system. This method not only met the requirement of anti-interference an