MOCVD技术与GaN材料外延工艺.pdfVIP

目 录 滴要 ··························································… … 人b s tr a c t ········. . ····. … … ，. ，，，，·. ··. . . . … … “… “二 “… “… ，… 引言 二 。. ·… … 。… … ，… ，.，. ·. ··················. ···········… … 1 绪论 ·······················································… … 巧 1.1 LED 的发 展 历程 ········································. … … 5 1.2 LED 的应 用 及其 广 阔前 景 ································… … 巧 2 外 延 设 备 ····················································… … 7 2.1 M OCVD 设 备 ·····························