压电双晶片的有限元分析和实验_英文_.pdfVIP

16 12 Vol. 16 No. 12 2008 12 Opt ics and Precision Engineering Dec. 2008 ( 2008)06 李龙土, 邬军飞, 褚祥诚, 季 叶 ( 清华大学材料科学与工程系新型陶瓷与精细工艺国家 点实验室, 北京100084) : , ;; 60 V( 120 Vp2p) , 166 Lm 34. 7 m# N, , , 310 H z, 20 Vp2p , 1. 7 mm :压电双晶片; 有限元法;PZT; 偏转位移 :TN384 :A Finite element analysis and experiment on piezoelectric bimorph LI Long2tu, WU Jun2fei, CHU Xiang2cheng, JI Ye ( State Key Laboratory of N ew Cer amics and Fine P rocessing , Department of Mater ial Science and Eng ineer ing , Tsing ua Univer sity, Beij ing 100084, C ina) Abstract: The deformation of imorph is analyzed y using the Finite Element Method (FEM) . The influences of middle elastic eam and piezoelectric layer on the deflection actuator are studied. The correlations of the applied voltage, the elastic modulus of eam and the thickness of piezoelectric layer ar e analyzed quantitatively to provide a theoretical asis and design method for the imorph actuators. The mechanical force derived fr om the imorph deformation is also studied. Furthermor e, experi2 ments are carr ied out to validate the finite element model. The vilidation shows that the tip2deflection can e as high as 166 Lm at a voltage of 60 V, while the mechanical force is 34. 7 m # N. The experi2 ment results demonstrate that the piezoelectric imorph model used in this paper is feasi le and effec2 tive. Moreover, the resonance property of the imorph is measured y the polytec 3002F scanning vi2 rometer. The imorph performs an exceeding deflection a out 1. 7 mm at the tip when it r esonates at a frequency a out 310 H z under an alternating voltage of 20 Vp2p. These numer ical and experimental results are useful to design and