付俊兴-开题报告.ppt

微结构耦合薄膜的制备及摩擦学特性研究;一、选题依据;角度;高温熔融精度低;Influence of hydrogen on the mechanical properties and microstructure of DLC films synthesized by r.f.-PECVD ——Jiong-Shiun H/Vacuum(2007);图3 不同掺杂DLC膜抗磨损能力;图5 四种表面镀覆DLC的微结构 (a)垂直;(b)平行;(c)微坑(d)凸起;图6 面积比对摩擦系数的影响;Tribological behavior of patterned PVD TiN coatings on M2 steel ——H.Y. Ma et al. / Tribol Lett (2004);Patterned PVD TiN spot coatings on M2 steel Tribological behaviors under different sliding  ——M. Hua et al. / WEAR (2006);三、课题研究方案;2、具体方案;试样前处理;四、研究基础;2.实验存在的困难： 磁控溅射镀膜工艺参数的选定，通过阅读文献和实践优化改进。 相关微结构耦合薄膜制备和摩擦实验研究数据较少，实验结果参考存在一定困难，需要在实验过程中主动探索和总结经验。;2012.2前：基材准备、掩膜板设计制作 2012.2-8：薄膜制备与参数探索、相关检测实验（膜厚、纳米 硬度、三维形貌、SEM 、XRD、EDS等） 2012.5-8：水润滑实验、相关检测实验（纳米硬度、三维形 貌、SEM 、XRD、EDS等） 2012.9-10：实验总结，数据处理。 2012.11-12：完善实验数据，书写论文;六、参考文献[1] 温诗铸,黄平.摩擦学原理(第3版)[M].北京:清华大学出版社, 2008. [2] Ma Yuping,Chen Ming,Xiang Daohui.FABRICATION OF DLC COATED COBALT-CEMENTED TUNGSTEN CARBIDEM ICRO-DRILLS AND THEIR CUTTING PERFORMANCE [J]. Transactions of Nanjing University of Aeronaut icsAstronautics,2007. [3] R. Hauert.A review of modified DLC coatings for biological applications [J]. Diamond and Related Materials,2003. [4] S . Aisenberg,Ronald . Chabot.Ion-beam deposition of thin films of diamond-like carbon [J].Journal of Applied Physics,1971. [5] 马国佳,邓新绿.类金刚石膜的应用及制备[J].真空,2002. [6] 曾群锋,董光能,谢友柏等.高速钢表面镀覆DLC膜的结构及其摩擦特性研究[J].润滑与密封,2007. [7] Xingyang Wu,Masahiro Suzuki,Tsuguyori Ohana. Characteristics and tribological properties in water of Si-DLC coatings[J].Diamond Related Materials,2007.;[8] Kenji Yamamoto,Katsuhiro Matsukado. Effect of hydrogenated DLC coating hardness on the tribological properties under water lubrication [J]. Tribology International,2006. [9] Jiong-Shiun Hsu,Shinn-Shyong Tzeng b,Ying-Jie Wu. Influence of hydrogen on the mechanical properties and microstructure of DLC films synthesized by r.f.-P