CGA接头编号.doc

气体种类 分子式 GAS TYPE 国家标准 CGA接头 UHP CGA DIN JIS 高纯气体 High Purity Gas W21.8-14RHF 180 350 乙炔 C2H2 Acetylene 轧兰 200/300/510 - - - 空气 Air Air G5/8-RHF 346/590 - - - 氨气 NH3 Ammonia G1/2-RHF 705 720 DIN6 22-R 氩气 Ar Argon G5/8-RHF 580 718 DIN6 22-R / 23-R 砷化氢 AsH3 Arsine - 350 632 - 22-l 三氯化硼 BCl3 Boron Trichloride G3/4-RHF/??? W21.8-14RHF 660 634 DIN8 - 三氟化硼 BF3 Boron Trifluoride G3/4-RHF/??? W21.8-14RHF 330 642 DIN8 22-l 丁烷 瓦斯 C4H8 Butane M22*1.5-LHM 510 - - - 二氧化碳 CO2 Carbon Dioxide G5/8-RHF 320 716 DIN6 - 一氧化碳 CO Carbon Monoxede W21.8-14LHF 350 724 DIN5 22-l 环丙烷 C3H6 Cyclopropane M22*1.5-LHM 510 - - - 乙硼烷 B2H6 Diborane - 350 632 - 22-l 二氯甲硅烷 CH3SHCl2 Dichlorosilane - 678 636 DIN5 - 二乙基锌 CH3CH2 2Zn Diethylzinc - 510 726 - - 乙烷 C2H6 Ethane M22*1.5-LHM 350 - - - 氯乙烷 C2H5Cl Ethyl Chloride G3/4-RHF 510 - - - 乙烯 C2H4 Ethylene M22*1.5-LHM 350 - - - 环氧乙烷 CH2CH2O Ethylene Oxide G5/8-RHF/ G3/4-RHF 510 - - - 锗烷 GeH4 Germane - 350or660 632 - - R11 R116 Halocarbon11 116 G3/4-RHF 660 716 - - R12 R13,R23,R115 Halocarbon12 G3/4-RHF 660 716 DIN6 - R14 Halocarbon14 G3/4-RHF 320/580 716 DIN6 - 氦气 He Helium G5/8-RHF 580 718 DIN6 22-R/23-R 氢气 H2 Hydrogen W21.8-14LHF 350 724 DIN1 22-L 氯化氢 HCl Hydrogen Chloride G3/4-RHF 330 634 DIN8 26-R 氟化氢 HF Hydrogen Fluoride G3/4-RHF/??? W21.8-14RHF 660/670 638 - 26-R 硫化氢 H2S Hydrogen Sulfide G3/4-RHF/??? W21.8-14RHF 330 722 DIN5 - 异丁烷 I-C4H8 Iso-Butane M22*1.5-LHM 510 - - - 氪 Kr Krypton G5/8-RHF 580 718 DIN6 22-R/23-R 甲烷 CH4 Methane W21.8-14LHF 350 - - - 氯甲烷 CH3Cl Methyl Chloride G3/4-RHF/??? W21.8-14RHF 660 - - - 天然气 Natural Gas W21.8-14LHF/ M22*1.5-LHM 350 - - - 氖气 Ne Neon G5/8-RHF 580 718 DIN6 22-R/23-R 一氧化氮 NO Nitric Oxide G3/4-RHF/??? W21.8-14RHF 660 - - - 氮气 N2 Nitrogen G5/8-RHF 580 718 DIN10 22-R/23-R 三氯化氮 NCl3 Nitrogen Trifluoride G3/4-RHF/??? W21.8-14RHF 330/670 640 DIN8 - 笑气 N2O Nitrous Oxide G5/8-RHF 326/660 712 DIN8 - 氧气 O2 Oxygen G5/8-RHF 540 714 DIN9 22-R/23-R 磷化氢 PH3 Phosphine W21.8-14LHF 350 632 DIN1 - 丙烷 C3H8 Propane M22*1.5-LHM 510 -