Zhao ShuiLin-FAB3 Wet Process Review.pptVIP

doritos\GS Technology Symposium\Presentation for GS Symposium_v3.ppt doritos\GS Technology Symposium\Presentation for GS Symposium_v3.ppt Wet Clean Process OverviewPrepared by: Jerry ZhaoApr 15, 2005 Introduction to Wet Cleaning Typical Process Flow Introduction to Wet Cleaning Wet Cleaning are a series of processes to make the wafer surface free from particles organic contamination inorganic contamination surface micro-roughness native oxide Introduction to Wet Cleaning Organic Contamination lubricants grease coolants detergents photoresist solvent residues fatty material from human han