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Gas Cabinet and Valve Manifold Box OrientationTrainer’s Guide Rev. 1, March 2005 M. Simon Course Overview Customers that use gas delivery equipment Gas cabinet orientation Objectives Mechanical component descriptions Controller components Controller operation modes Valve manifold box orientation Objectives Mechanical component descriptions Comparison to gas cabinet controller (major differences) Overall system integration Complete system diagram Who uses gas delivery equipment Many semiconductor, electronics, and equipment manufacturers use APCI gas delivery equipment: Applied Materials Cypress Semiconductor IBM Intel LSI Logic Lucent Technologies Motorola Novellus Gas Cabinet Orientation Objectives Explain the purpose of the gas cabinet Draw and label a simplified schematic of a gas delivery panel Identify each gas panel component and explain its purpose Explain the purpose of the gas cabinet controller Identify major controller components Explain the 3 basic modes of a controller Gas Cabinet Purpose Safely and continuously provide process gas to the end user Gases can have both single and multiple classifications: Toxic - Flourine Flammable - Hydrogen Pyrophoric: Silane Corrosive - Hydrogen Bromide Oxidizer - Nitrous Oxide Inert - Helium Multi-class Dichlorosilane: Toxic, corrosive, and flammable Why does one need a gas cabinet? Safety Containment of hazardous material within a ventilated enclosure. Automated controls Allows panel manipulation from a local and remote location Provides local and remote alarm capabilities Provide purging capability for safety and purity reasons Avoid personnel exposure to toxics, corrosives, flammables, etc. Gas Cabinet Enclosure Gas Cabinet Enclosure Purpose Provides secondary containment between hazardous gases and personnel / environment Provides exhaust to facility abatement systems Provides self closing door and window Window allows visual inspections and accessibility Provides sprinklers for cylinder cooling due to an