Micro-manipulated.docVIP

Micro-manipulated Cryogenic Vacuum Probe Systemsfor Chips, Wafers and Device Testingfrom ~3 K to 475 K Probe Station for UHV Environment Four Probe High VacuumRoom Temperature Probe Station Close up of Sample Area onUHV Probe Station Ultra High Vacuum Probe Stations Janis offers a complete range of probe stations suitable for making electrical measurements in a UHV environment.? Several standard designs are available, and systems can be custom configured to meet a wide variety of user requirements.? Janis has been manufacturing UHV compatible systems for over 40 years, and we apply this extensive experience to the design of every UHV probe station.? Typical UHV probe stations include: All stainless steel vacuum chamber with metal sealed flanges CF UHV rated electrical feedthroughs and electrical probes UHV rated optical viewport Fully bakeable to 120 °C Room temperature or cryogenic configurations Sample size 25 – 50 mm diameter 2 – 8 integrated x-y-z probe manipulators, with electrical probes installed Temperature range from 5 – 700 K available Monoscope, camera, and monitor for viewing samples and probes Options include: Larger diameter vacuum chamber and sample mount Load lock option for sample exchange without opening the chamber Integrated UHV turbopump for maximum pumping speed and lowest base pressure Vibration isolated stand Model RT-3LF-2-CX-UHV Probe Stations Mechanical Drawing Top View Side View 超高真空探针台系统Janis在UHV环境里为电学材料提供了一套完整的探测台系统。既有几款标准配置，也可以根据客户需要专门定制。Janis有40多年的制造UHV的经验利用这些技术制造UHV探针台。典型的UHV探针台包括：1 金属法兰 CF 密封的不锈钢真空腔2 UHV 级电学穿通装置和电子探针3 UHV 级光学观察窗4 可烘烤至120 °C5 室温或低温配置6 样品尺寸直径25 – 50 mm.7 集成2 – 8个x-y-z探针操作器和电子探针8 温度范围从5 – 700 K9 观察样品和探针的单显器、照相机和监视器 可选项包括：1 更大直径真空腔和样品支架2 不开腔更换样品的装载互锁3 为最大泵速和最低背底压强而集成UHV涡轮泵4 防振台 超高真空探针台 四探针超高真空室温探针台 超高真空室温探针台样品密封区