微机械振动轮式陀螺.docVIP

A DOUBLY DECOUPLED MICROMACHINED VIBRATING WHEEL GYROSCOPE Q.C. Zhao1,2, X.S. Liu1, L.T. Lin1, Z.Y. Guo1, J. Cui1, X.Z. Chi1, Z.C. Yang1*, G.Z. Yan1 1National Key Laboratory of Micro/Nano Fabrication Technology Institute of Microelectronics, Peking University, Beijing, 100871 CHINA 2State Key Laboratory of Transducer Technology, Chinese Academy of Sciences Abstract In this paper, a doubly decoupled vibrating wheel gyroscope with novel torsional sensing comb capacitors is presented. The doubly decoupled design and symmetrical structure can efficiently suppress the mechanical coupling of the gyroscope. Moreover, the symmetrically distributed proof masses make it immune from the linear accelerations. Both driving and sensing modes of the gyroscope are dominated by slide film air damping, so it can work even at atmospheric environment. The process for this gyroscope is also compatible with z-axis gyroscope, which makes it potential to realize low cost monolithic MIMU miniature inertial measurement unit without vacuum packaging. The gyroscope was fabricated and tested at atmosphere. The sensitivity is 3.1mV/°/s while the nonlinearity is 7.68‰ with the full scale of 900°/s. The noise floor is 0.45°/s/Hz1/2. Keywords Lateral axis, gyroscope, doubly decoupled Introduction Owing to the advantages on size, weight, cost, power consumption, micromachined gyroscopes are becoming more and more attractive for applications on inertial navigation, automobile safety systems, robotics, consumer electronics, and so on. In the last two decades, various micromachined gyroscopes have been developed. In order to improve the overall performance of a gyroscope, mechanical coupling between the driving and sensing modes must be suppressed. A decoupled structure is an efficient and low cost approach to suppress the undesired coupling [1-4], which can suppress not only the CFDTS coupling from driving mode to sensing mode but also the CFSTD coupling from sensing mode to driving mode .