全球半导体晶体生长计算著名商业软件FEMAG_Numerical Simulation of Crystal Growth for Application.ppt

FEMAGSoft ? 2013 No Marangoni convection With Marangoni convection Equivalent axisymmetric calculations 4. DS process simulation cont’d FEMAGSoft ? 2013 3D FEM-spectral calculations 3D effect of Marangoni convection 4. DS process simulation cont’d Sapphire growth simulation FEMAGSoft ? 2013 5. Sapphire growth FEMAGSoft ? 2013 Steel pulling axis Sapphire Iridium crucible Zirconium oxide Zirconium oxide granules Quartz Simulation of sapphire crystal growth by the Czochralski method Furnace model 5. Sapphire growth cont’d FEMAGSoft ? 2013 Melt meshes BLM boundary layer mesh Coarse mesh 5