全球半导体晶体生长仿真著名商业软件FEMAG--Numerical Simulation of Bulk Crystal Growth.ppt

* * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * FEMAGSoft ? 2013 Rs 5.1 cm, Rf 4.7 cm, Ws 10 rpm, Wf -15 rpm vpul 3.4 mm/min Streamlines 6. Modeling of FZ growth cont’d FEMAGSoft ? 2013 Rs 5.1 cm, Rf 4.7 cm, Ws 10 rpm, Wf -15 rpm vpul 3.4 mm/min Difference of interstitial and vacancy concentrations CI - CV 6. Modeling of FZ growth cont’d FEMAGSoft ? 2013 Rs 5.1 cm, Rf 4.7 cm, Ws 10 rpm, Wf -15 rpm vpul 3.4 mm/min Difference of interstitial and vacancy concentrations CI - CV detail 6. Modeling of FZ growth cont’d FEMAGSoft ? 2013 von Mises invariant: global v