基于PLC的单晶炉的自动化控制系统的设计.docVIP

基于PLC的单晶炉的自动化控制系统的设计Abstract During the growth of single-crystal furnace crystal, production process automation and seeding, shouldering, and other control path and ending the four stages of production furnace temperature feel the quality of this product, especially to control the temperature in the furnace single crystal silicon crystal formation process played a crucial role. In our case, most of the single-crystal silicon production enterprises furnace production process or whether it is the level of automation are lagging behind, furnace temperature control accuracy is not high direct