Radiation Damage in Sentaurus TCAD.pptVIP

Radiation Damage in Sentaurus TCAD Overview Introduction to trap models Radiation damage effects and defects P-type damage model Some example simulations Sentaurus Device command file Radiation damage introduction High-energy particle displaces silicon atom from a lattice site Results in a vacancy and an interstitial Atom can have enough energy to displace more atoms After damage is caused, most vacancy-interstitial pairs recombine Left with more stable defect clusters, e.g. divacancy V2 Defect clusters affected by annealing conditions impurities in the silicon Defect clusters give extra e