半导体工艺及器件模拟一技术总结.ppt

* * 半导体器件结构编辑--MDRAW 加一个新层 To add a complex layer around the device: 1. From the Materials menu, select a material. 2. From the Tools area, click Multiline. 3. Click the point where the new layer is to begin or click any place outside the device. 4. Continue clicking outside the device to define the remainder of the points. 5. Right-click to complete the multiline. * * 半导体器件结构编辑--MDRAW * * 半导体器件结构编辑--MDRAW To add a simple (rectangular) layer around the device: 1. From the Materials menu, select a material. 2. From the Tools area, click Add Rectangle. 3. Drag the pointer until one corner (or more) of the rectangle touches a point in the device. * * 半导体器件结构编辑--MDRAW * * 半导体器件结构编辑--MDRAW 在已有器件内部定义一个孔或者一个矩形 To define a hole in a device: 1. From the Tools area, click Add Rectangle. 2. Drag the pointer inside a layer, drawing a rectangle to the required specification. A rectangular layer is drawn inside the device. 3. From the Tools area, click Delete. 4. Click the rectangular layer. The rectangular layer is deleted and a hole is created. * * 半导体器件结构编辑--MDRAW * * 半导体器件结构编辑--MDRAW To define a rectangular layer in a device: 1. From the Materials menu, select a material. 2. From the Tools area, click Add Rectangle. 3. Drag the pointer inside a layer, drawing a rectangle to the required specification. A rectangular layer is drawn in the device. * * DIOS-Ligament操作命令 Etch Al * * DIOS-Ligament操作命令 Etch resist * * DIOS-Ligament操作命令 Insert: 在dios名下输入： 1D (file=n@node@_implant1,spec(netactive, Btotal), Xsection=4, append=on) Insert: 1D(file=n@node@_implant2,spec(netactive, Ptotal), Xsection=7, append=on) * * DIOS-Ligament操作命令 Insert: Save( file=n@node@, type=mdraw, synonyms(Al=metal) Contact (contact1(name=anode, 3, 5) Contact2(name=cathode,location=bottom) ） ) * * DIOS-Ligament 操作命令 编辑完Ligament Flow后，保存，关闭。 运行 * * 半导体器件结构编辑--MDRAW 启动MDRAW：在$提示符下输入 mdraw Message box 首选项区