FilmDepositioninICFabrication.pptVIP

Chemical Vapor Deposition (CVD) Different thin film textures Step Coverage of Deposited Films SiO2 Films for masking protection Other Films for masking protection Silicide Contacts * Film Deposition in IC Fabrication Metal Contacts/Connections Electrodes Masks Wire insulation Device encapsulation Low stress Adherent Uniformity, no pin holes Conformal step coverage Thermal electrical stability Vapor pressure of metals RF Sputter System Magnetron Sputter Deposition Sputter Deposition Systems E DC Sputter Deposition Voltage ratio in RF sputtering: VC/VA = (AA/AC)n Low-