SimplifiedExampleofaLOCOSFabricationProcess.ppt

Simplified Example of aLOCOS Fabrication Process Prof. A. Mason Electrical and Computer Engineering Michigan State University LOCOS Defined LOCOS = LOCal Oxidation of Silicon Defines a set of fabrication technologies where the wafer is masked to cover all active regions thick field oxide (FOX) is grown in all non-active regions Used for electrical isolation of CMOS devices Relatively simple to understand so often used to introduce/describe CMOS fabrication flows Not commonly used in modern fabrication other techniques, such as Shallow Trench Isolation (STI) are currently more common than L