利用FIB制备TEM样品简明剖析.ppt

Recipe of making TEM sample 9/15/2014 ①Deposition E-beam depositon (10 minutes) Voltage(kV) Current(nA) Size(μm) X*Y*Z Stage degree(°) SiO2 5 1.6 10*2*5 0 Pt 5 1.6 10*2*1 0 Ion-beam deposion (15 minutes) Voltage(kV) Current Size(μm) X*Y*Z Stage degree(°) Pt 20 81pA 10*2*0.7 52 Pt 30 0.1nA 10*2*0.7 52 ② U-cut (25 minutes) Voltage (kV) Current (nA) Size (μm) X*Y*Z Stage degree (°) Regular cross-section 30 5 15*4*2 53 (front side) Regular cross-section 30 5 15*8*4 51 (back side) Clean cross-section 30 1 15*y*2 53 (front side) Clean cross-section 30 1 15*y*2 51 (back side) U-cu