arrayprocess课程.pptVIP

Array Process 一 GL PEP Cleaning Sputter Coating Exposure Developing Dry etching Strip Open/Short Text 二 I/S PEP Cleaning AP-CVD Cleaning P-CVD Clenaing O2 ashing Coating Back exosre Exposure Developing Wet etching Strip 三 AI PEP cleaning P-CVD Coating Exposure Developing CDE dry etching Strip 四 PX PEP Cleaning ITO sputter ITO cleaning Coating Exposure Developing Wet etching Strip 五 TH PEP Coating Exposure Developing Wet etching Sttip 六 SL PEP Clenaing S/D Sputter S/D Cleaning Coating Exposure Developing S/D Etching N+Cut Strip 七 PV PEP Cleaning P-CVD Coating Exposure Developing Dry etching Strip TEXT TEXT glass cleaning glass glass glass glass glass glass glass glass glass glass glass S/D cleaning glass S/D sputter glass cleaning glass glass glass glass glass glass glass cleaning glass glass glass glass * * glass clenaing glass sputter Gate ling CS gas：Kr N2 glsaa coating glass mask glass glass glass gate Cs gate glass text glass cleaning glass SiH4 O2 N2 Gate SiOx glass gleaning glass SiH4 N2O N2 SIH4 NH3 N2 SIH4 H2 SiH4 NH3 N2 SiOx g-SiNx a-si SiNx glass cleaning glass SiNx SiOx glass glass glass glass glass glass Glass N+cleaning glass N+a-si glass glass glass glass glass glass ITO cleaning glass ITO sputter *