原子理论美国某高校等离子体讲义.pptVIP

* September 2, 2004 Plasma is a Mixture of electrons, ions, neutrals and Photons + + + + + + + + + + + + + + + + + + + Power Supply: Power (currents Voltages) Impedance Frequency Coupling Materials: Solid Liquid Gas Plasma Container: Geometry Pressure contaminations Breakdown Plasmas: Concentrations Velocity distributions (or temperatures? ) Maintenance Propertises Thermodynamic: enthalpy, entropy, internal energy, free energy, … Transport: viscosity, electrical and thermal conductivity, mobility, … Beams: Laser Electrons ions + + + + + + + + + Eelectrons: me=9.1 x 10-31 Kg k= 1.38 x 10-23 J/K 1 eV = 1.6 x 10-19 J = 7,740 K = 6 x 105 m/s Room Temperature: 293 K = 1.2 x 105 m/s Boltzmann’s Constant Understanding of plasma and plasma-surface interaction is essential in working with and improving plasma processing applications. - Species concentrations - Velocity distributions of species (or temperatures? ) Species structure and properties Interactions among species Species reactions to external fields (electric and magnetic) Variations of species concentrations and velocity distributions in the boundary layer between plasma and surfaces + + + + + + + + + Surface Boundary layer Plasma 1- Species structure and properties 2- Interactions among species 3- Species reactions to external fields (electric and magnetic) 4- Species temperatures (or velocity distributions) 5- Species concentrations 6- Plasma-Surface Interaction 7- Plasma Characteristics 8- Plasma Discharges 9- Plasma Applications The order of our studies: Electrons: mass=9.11 x 10-31 Kg, Charge=1.602 x 10-19 C and F=e(E+v x B) Lorentz Force Photons: E=h?, c=?? and p=h/? h=6.626 x 10-34 JS Neutrals: Atoms molecules have internal structure Therefore, they have kinetic + internal energies Ions: Almost the same mass as neutrals Positive (H+ Cl2+) and negative ions (O2- SF6-) (Structures and Properties) Pages 15-19 Structure of an Atom Pages 73-77 (Schroedi