Surface micromachined RF MEMS solenoid inductors and variable capacitors(英文)18694.pptVIP

Surface micromachined RF MEMS solenoid inductors and variable capacitors Dong-Ming Fang Outline Background Introduction Introduction Introduction Introduction Introduction Introduction Introduction Introduction Introduction Simulation Simulation Simulation Simulation Fig.1. HFSS model of the inductor and the capacitor Fabrication Fig.2. Structure of air-core solenoid inductor Fabrication Fig.4. The fabrication process … Result Results Conclusion fangdm@ime.pku.edu.cn 微电子学研究院 微米纳米加工技术国家级重点实验室 第一届微纳米企业研讨会（无锡） 方东明 May 10, 2008 * 第一届微纳米企业研讨会（无锡） May 10, 2008 Introduction Simulati