《PECVD工作工艺原理.pptVIP

Evaluation only. Created with Aspose.Slides for .NET 3.5 Client Profile 5.2.0.0. Copyright 2004-2011 Aspose Pty Ltd. PECVD的原理 目录 PECVD的作用 PECVD工艺参数的调整 安全 Evaluation only. Created with Aspose.Slides for .NET 3.5 Client Profile 5.2.0.0. Copyright 2004-2011 Aspose Pty Ltd. PECVD：Microwave Remote Plasma Enhance Chemical Vapour Deposition 微波间接等离子增强化学气相沉积 定义 等离子体：由于物质分子热运动加剧，相互间 的碰撞就会使气体分子产生电离，这样物质就 会变成自由运动并由相互作用的正离子、电子 和中性粒子组成的混合物。 Evaluation only. Created with Aspose.Slides for .NET 3.5 Client Profile 5.2.0.0. Copyright 2004-2011 Aspose Pty Ltd. Evaluation only. Created with Aspose.Slides for .NE