《PECVD工艺培训.pptVIP

PECVD工艺培训 彭文磊 2011.01.12 Evaluation only. Created with Aspose.Slides for .NET 3.5 Client Profile 5.2.0.0. Copyright 2004-2011 Aspose Pty Ltd. 目 录 总述 PECVD设备简介 3 PECVD的基本原理与工艺 4 PECVD检测介绍 5 注意事项 Evaluation only. Created with Aspose.Slides for .NET 3.5 Client Profile 5.2.0.0. Copyright 2004-2011 Aspose Pty Ltd. 1、PECVD工序在太阳电池制造中的位置 清洗制绒 磷扩散形成p-n结 腐蚀，去磷硅玻璃 PECVD 沉积SiNx 印刷 烧结 测试 分选包装 Evaluation only. Created with Aspose.Slides for .NET 3.5 Client Profile 5.2.0.0. Copyright 2004-2011 Aspose Pty Ltd. 2、二厂PECVD设备介绍 设备厂家：上下料设备——台达 PE设备——ROTHRAU Evaluation only. Created with Aspose.Slid