Sensing Tilt With MEMS Accelerators1.doc

cal systems accelerators and with an accuracy of 0.3皁ver the full measurement range of pitch and roll is presented. Such sensor performance has been achieved, owing to the application of an original method of determining tilt angles, which is described in this paper. Experimental studies performed on a physical model of the sensor are discussed, and ways on improving the performance of the sensor are briefly introduced. Index Terms-Accelerometer, accuracy, measurements, micro-electromechanical systems (MEMS), tilt sensor. 用微机电加速度计敏感载体的倾斜角 摘要：提出了一种由标准微机电系统加速度计构成的微小角度传感器，它在满量程测量纵摇角和横摇角时的精度为0.3°。论文描述了这种传感器的性能水平已成功达到应用于决定载体倾斜角初始测量方法中。介绍了基于传感器物理模型的试验研究和提高传感器性能的方法。 关键词：加速度计，精度，测量，微机电系统（MEMS），倾斜角传感器。 1 Introduction The structure of modern mechatronic devices usually consists of a microprocessor control system and sensors and actuators-units that often have to feature miniature dimensions, high reliability，and accuracy of operation. A type of such unit is the tilt sensor, which is used in many devices such as robots, advanced surgical tools, navigation systems, and attitude-control systems [1], [2]. 1 引言 这种现代机械装置的结构通常包括一个微处理器控制系统、传感器和激励单元，一般激励单元必须具有微小尺寸、高可靠性和操作准确的特点。一个典型的这种单元是倾斜角传感器，它被应用在机械人、高级外科手术工具、导航系统和姿态控制系统等多种装置里[1]，[2]。 While constructing a mobile snakelike microrobot made of identical modules having dimensions of ca.25 mm presented in [3]-[5], it turned out that the accepted control system of the robot required the application of other robots of this type, e.g., those presented in [6] and [7]. Since commercial tilt sensors usually have overall dimensions that exceed several dozens of millimeters or a limited measurement range (of approximately several dozens of degrees arc), e.g.,[8] and [9], it was necessary to attempt to build a tilt sensor that meets the following technical requirements: detection of tilt over the steregon, overall dimensions below 25 mm, accuracy of indications of ca. 1? and operation under quasi-static conditions (where constant acceleratio