ppt课件-vacuumsystemdesignconsiderations-universityofutah.pptVIP

Vacuum System Design Considerations Materials Plumbing Pumping Throughput Ultimate pressure Dynamic equilibrium Pumping speed Leaks Leaks Real Holes in the system! Virtual Surface adsorption Outgassing Huber’s rule Water desorbs very slowly from all surfaces Always backfill your vacuum system with dry nitrogen Minimize surface area Ultimate vacuum/limiting pressure System bakeout P(T) = P0 exp(-ΔHv/R(1/T – 1/T0)) Applies to evaporation Applies equally well to desorption Replace ΔHv with “some desorption energy” Vacuum System Bakeout Materials for vacuum systems 1. What is its vapor pressure?