ppt课件-spintronicsintegratingmagneticmaterialswithsemiconductors.pptVIP

* * * * * * * * * * * * * * * * * * * * * * * * * * * * * * * Bulk micromachining Wet Chemical etching: Bulk Si Bulk Si Masking layer Isotropic Anisotropic Surface micromachining Carving of layers put down sequentially on the substrate by using selective etching of sacrificial thin films to form free-standing/completely released thin-film microstructures /mto/mems HF can etch Silicon oxide but does not affect Silicon Release step crucial MEMS: Foundry services SAMPLES: Sandia Agile MEMS Prototyping, Layout tools, Education and Services (Current process: SUMM