本科毕业设计__静电放电(esd)保护器件的模拟与仿真.docVIP

编号 本科生毕业设计（论文） 题目： 静电放电（ESD）保护器件 的模拟与仿真 物联网工程 学院 微电子学 专业 二〇一四年六月 摘 要 静电放电(Electrostatic Discharge，ESD)是构成集成电路可靠性的主要因素之一，存在于生产到使用的每一个环节，并成为开发新一代工艺技术的难点之一，近年来，对ESD的研究也因而越来越受到重视，仿真工具在ESD领域的应用使得ESD防护的研究变得更为便利，可大幅缩短研发周期. 然而，由于ESD现象复杂的物理机制，极端的电场及温度条件，以及ESD仿真中频繁的不收敛现象，都使得ESD的仿真变得极为困难.本文详细阐述了ESD的来源、造成的危害以及如何测试集成电路的防静电冲击能力，并基于Sentaurus软件，对ESD防护器件展开了的分析、研究，内容包括： 掌握ESD保护的基本理论、测试方法和防护机理. 研究了工艺仿真流程的步骤以及网格定义在工艺仿真中的重要性，并对网格定义的方法进行了探讨. 研究了器件仿真流程以及器件仿真中的物理模型和模型函数，并对描述同一物理机制的的各种不同模型展开对比分析.主要包括传输方程模型、能带模型、各种迁移率退化模型、雪崩离化模型和复合模型. 研究了双极型晶体管和可控硅（Silicon Controlled Rectifier，SCR）防护器件的仿真，并通过对仿真结果的分析，研究了ESD保护器件在ESD应力作用下的工作机理. 关键词：静电放电；网格；器件仿真；双极型晶体管；可控硅 ABSTRACT ESD is one of the most important reliability problems of IC products which lies in every flow of IC production, and it is also one of the most difficult problems of developing new generation technology, therefore, the research on ESD protection design has attracted more and more attention. The applications of simulation tools on ESD area make the design of ESD protection devices more convenient, and greatly shorten the development cycle. However, due to the complicated physical mechanism of ESD, the extremely high field and high temperature when ESD happened, and the frequently convergence problem in ESD simulation, it becomes difficult to carry out the ESD simulation. So this paper particularly explain show ESD comes from, what harm will bring, how to test the integrated circuits ability to prevent from the static, also concentrates on the simulation of ESD protection devices, based on the Sentaurus TCAD platform. And the main content of this paper include: First, this paper points out the basic theory, test methods and protective mechanism of ESD protection. Second, study the importance of the grid to define the steps and process simulation processes in the process simulation, and the method of the grid defined discussed. Third, in device simulation process and device simulation is studied in