球面绝对检验-上传.pptVIP

球面绝对检验 两球面绝对检验 可以获得?/40的检测精度 所需仪器设备 ZYGO GPI干涉仪 标准球面透镜 被测球面 五轴调整架、转盘、叉丝标记 检测光路 要求 测量步骤 注意事项 有效区域无切割 尽量调到零条纹 使用叉丝做标记 球面标准镜的校正 /products/caliball-i-ii CaliBall easily calibrates the reference surface to λ/30 or better rms, 3X better than commercial grade transmission sphere optics. CaliBall comes in two models: CaliBall I for vertical interferometer set ups and CaliBall II for horizontal set ups which bayonet mounts into a typical Zygo or ESDI 4″ mount. 原理 A Simple Ball Averager for Reference Sphere Calibrations Ulf Griesmann, Quandou Wang, Johannes Soons, and Remi Carakos National Institute of Standards and Technology (NIST), Manufacturing Engineering Laboratory, Gaithersburg, MD 20899-8223, U.S.A. The ball is made from Schott UG-1 filter glass，不透明，直径50mm CaliBall CaliBall is a 25.4mm diameter, high precision silicon nitride ball and kinematic mount used to calibrate phase-measuring interferometers by determining the errors in the transmission-sphere reference-surface.?The CaliBall is located with its center at the focus of the transmission sphere and aligned to better than one fringe. A measurement of the ball is taken, the ball picked up, arbitrarily rotated and replaced on its mount. The center of the ball will return to the original position due to the kinematic mount. Another measurement of the ball is then taken.? This process is repeated about a dozen times and the interferograms averaged. The average represents the errors in the transmission sphere and interferometer because the ball is extremely round and the small imperfections of the ball average to zero. The calibration can be done in as little as 10 minutes and the result is difficult to dispute. Best used with low F/# transmission spheres. CaliBall 随机球面测试法标定透射球面镜 标定工具，如下图：25mm半径的小球，等级为5级，圆度优于125nm，抛光表面，粗糙度在1~2nm；小球下面的支承座，由三个同样大小的小球组成； 标定时，将小球支承安装到合适的干涉仪调整架上，底座切平的一侧靠近TS；支承一定要固定紧，并且测试时需带好无尘手套，避免手直接接触小球。如果小球表面比较脏，可用丙酮或者酒精将表面清洁干净。 打开软件，先粗对准光路，使小球的球心接近TS的焦点； 打开软件视频窗口，设置好软件参数，比如光强、选中移除piston、tilt及focus项，