ILC Vertex Detector RD at FermilabILC顶点探测器RampD在费米实验室.pptVIP

3D Sensors - Vertical Integration of Detectors and Electronics Contents: Introduction to three dimensional integration of detectors and readout electronics ILC requirements Design of a 3D prototype chip Production of thinned, 4-side abuttable sensors SOI-based sensor/readout integration Loose collaboration - Fermilab, Cornell, Purdue, Bergamo This technology may be new to some - so I will spend some time in explanation. What is 3D Circuit Integration? Key Enabling Technologies Wafer thinning (to 25?m) Grinding, lapping, etching, and chemical polishing Precision alignment Better tha