Scanning Electron MicroscopySEM UiO扫描电子显微镜SEM UIO.pptVIP

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Scanning Electron MicroscopySEM UiO扫描电子显微镜SEM UIO.ppt

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Scanning Electron MicroscopySEM UiO扫描电子显微镜SEM UIO

Scanning Electron Microscopy (SEM) Anders Werner Bredvei Skilbred Harald Fjeld Outline What can we use a SEM for? How do we get an image? Electron beam-sample interactions Signals that can be used to characterize the microstructure Secondary electrons Backscattered electrons X-rays Components of the SEM Some comments on resolution Summary The most versatile instrument for a materials scientist? What can we study in a SEM? Topography and morphology Chemistry Crystallography Orientation of grains In-situ experiments: Reactions with atmosphere Effects of temperature Topography and morphology High depth of focus Depth of focus Optical microscopy vs SEM Chemistry In-situ imaging A modern SEM can be equipped with various accessories, e.g. a hot stage In-situ imaging: oxidation of steel at high temperatures 800 °C, pH2O = 667 Pa Formation of Cr2O3 How do we get an image? In brief: we shoot high-energy electrons and analyze the outcoming electrons/x-rays The instrument in brief How do we get an image? Electron beam-sample interactions The incident electron beam is scattered in the sample, both elastically and inelastically This gives rise to various signals that we can detect (more on that on next slide) Interaction volume increases with increasing acceleration voltage and decreases with increasing atomic number Signals from the sample Secondary electrons (SE) Generated from the collision between the incoming electrons and the loosely bonded outer electrons Low energy electrons (~10-50 eV) Only SE generated close to surface escape (topographic information is obtained) Number of SE is greater than the number of incoming electrons We differentiate between SE1 and SE2 SE1 The secondary electrons that are generated by the incoming electron beam as they enter the surface High resolution signal with a resolution which is only limited by the electron beam diameter SE2 The secondary electrons that are generated by the backscattered electrons that have returned to the surface afte