WAT-Basic-Introduction教学课件.ppt

WAT Basic Introduction Summary What is WAT? Why do we need WAT? What can and can’t WAT do? WAT basic concept/device/Layout Manual WAT probe (4156) QA What is WAT? WAT is abbreviation for Wafer Acceptance Test. WAT is the last process in FAB. WAT is an important process in FAB. decide whether the wafer go through an normal process, and ship to customer. Why do we need WAT? WAT can test individual device of street, not die or chip. WAT can check electric characters of individual device. WAT can monitor front process via electric characters of individual device. WAT can provide out device test data for consumer. What can and can’t WAT do? What can and can’ t WAT do?.cont WAT basic concept/device/layout WAT basic concept/device/layout.cont WAT basic concept/device/layout.cont MOS key parameters: Vt and Gm Idsat Ioff VBD Isub DIBL GAMMA SWING Gleak, Isubmax, Isubvg, Gleak2, SUBVTSLP, Vt1, Vt2, MFAC1, MFAC2, BETA Gate capacitor key parameters:1) TOX,2) Leakage 3) Breakdown Voltage4) Cap WAT basic concept and device.cont Diode Key Parameters: Capacitor Leakage Breakdown voltage Contact Resistance: Rc WAT fail analysis process debugging WAT manual probe PIE need learn to manual probe to confirm the WAT test data! What is the Limited file? Limited file is a text file that defines every parameter OOS, OOC and validation value. Limited file defines parameter type, Key or non-key. It decides whether site, wafer and lot can pass or fail. Limited file is from customer. Gating rule Gating rule Test 5 sites at WAT for every wafers If fail sites = 3 in one wafer, this wafer will be scrapped For Gox related parameters (VBD_GO/NW, VBD_GO/PW, INS_GO/NW, INS_GO/PW SPA_PO1) If wafers with 1 site fail = 2 pcs, mapping 6 pcs, scrapped by wafer if the fail sites in one wafer = 15% If wafers with 1 site fail = 3pcs, mapping all wafers, scrapped by wafer if the fail sites in one wafer = 15%, and if scrapped wafers = 12 pcs then scrapped this lot QA Poly M1