1．理论分析.doc

硅酸镓镧声表面波 赵一宇1） 李红浪1）?程利娜1） 柯亚兵1） 郭霄鹏2）何世堂1） 1）（中国科学院声学研究所，系统实验室，北京） （北京 100081） 声表面波解耦有限元与微扰理论传感器不同压力下响应，构造出传感器压力公式基于）压力公式~1MPa范围内结果基本吻合，压力多参量解耦方法正确性。 ：声表面波），传感器，（LGS点压力式温度 PACS数：43.58, 43.35 Multi-parameter Decoupling of Pressure and Temperature for Surface Acoustic Wave Sensor Based on Langasite* Zhao Yi-yu1) Li Hong-lang1)? Cheng Li-na1) Ke Ya-bing1) Guo Xiao-peng2) He Shi-tang1) (1 Acoustical Microelectromechanical System Laboratory, Institute of Acoustics, Chinese Academy of Science, Beijing 100190, China) (2 Beijing Institute of Technology, School of Optoelectronics, Beijing 100081, China) Abstract For Surface Acoustic Wave (SAW) pressure sensor based on Langasite (LGS), a multi-parameter decoupling method of the pressure and temperature interference is proposed. Theoretically, frequency response in different temperature and pressure is calculated by the method which combines Finite Element Method (FEM) and the perturbation theory. Taking a SAW pressure sensor based on (0°, 0°, 100°) LGS substrate with point load structure as an example, the parameters of the decoupled formula is calculated. The experiment is carried out under a temperature scope of -55℃~125℃ and a pressure scope of 0~1MPa. The experimental frequency response coincides with the theoretical result, which shows a reasonability of the decoupling method. Key words: Surface Acoustic Wave (SAW), pressure sensor, Langasite (LGS), point pressure load, decoupling of temperature and pressure ———————————————— *国家自然科学基金(批准号11304346)，国家高技术研究发展计划(863计划)(批准号：SS2013AA041103)和北京市科技计划课题（批准号：Z141100003814016）资助的课题. ?通讯作者.E-mail: lhl@mail.ioa.ac.cn 引言 声表面波（Surface Acoustic Waves， SAW）压力传感器利用声表面波对表面敏感的特性，具备体积小轻灵敏度高，工作高温、强电磁干扰等恶劣环境[1-6]。SAW压力传感器石英材料，石英相变温度只有[7]，在高温环境下耐高温压电材料Langasite，LGS）材料以其耐温机电耦合系数石英高高温SAW传感器[8]。 目前基于LGS的W压力传感器温度对传感器的影响。缅因Scott C. Moulzolf等人制作方形空腔四周固定的压力敏感基片上制作两个同切向芯片通过差分输出方式温度压力影响[9] 切向芯片由于谐振频率不同，Aleksandrov K. S.以及Taziev R. M.等人提出数学解析方法得到圆形、方形空腔的基片表面应力应变分布LGS压力传感器灵敏度[10, 11]。结构压