精密加工技術概論-ysl.pdf

精密加工技術概論 精密加工技術概論 簡介 課程目標： 介紹與精密機械、模具、硬脆材料（如光 學鏡片、晶圓）加工、微細零件及微機電 系統等相關之精密(微米)、超精密(奈米) 及微製造等加工技術。 Precision Engineering Precision Engineering May be defined as manufacturing to tolerances smaller than 1 part 104 or perhaps 105 . Definitions of accuracy, precision, Definitions of accuracy, precision, and resolution and resolution Accuracy (準確度) Accuracy (準確度) the degree of the agreement of the measured dimension with its true magnitude. Precision (or repeatability, 精密度) Precision (or repeatability, 精密度) degree to which an instrument gives repeated measurement of the same standard. Resolution (解析度 ) Resolution (解析度 ) smallest dimension that can be read on an instrument. 準確度、重複性、解析度示意圖 準確度、重複性、解析度示意圖 Accuracy (準確度) vs. Precision (精密度) Accuracy (準確度) vs. Precision (精密度) 誰打得比較好？ Accuracy (準確度) vs. Precision (精密度) Accuracy (準確度) vs. Precision (精密度) 誰能成為最好的神槍手？ Accuracy (準確度) vs. Precision (精密度) Accuracy (準確度) vs. Precision (精密度) The concept of accuracy and precision Accuracy (準確度) vs. Precision (精密度) Accuracy (準確度) vs. Precision (精密度) Distribution of measurement High accuracy Low accuracy but High accuracy and but low precision high precision high precision Tolerances on components for a range of modern products Achievable machining accuracy after Taniguchi, Annals of the CIRP, vol. 32/2, 1983, pp.573-582. The range of dimensional tolerances obtained in various machining processes The range of surface roughness obtained in various machining processes Grinding Grinding輪磨( ) Honing and Superfinishing Honing Honing (搪磨) (搪磨)