_化学气相沉积.pptVIP

Vacuum and Exhaust system Gas handle system Computer Control Reactor MOCVD Growth System Gas handling system The function of gas handling system is mixing and metering of the gas that will enter the reactor. Timing and composition of the gas entering the reactor will determine the epilayer structure. ? Leak-tight of the gas panel is essential, because the oxygen contamination will degrade the growing films’ properties. Fast switch of valve system is very important for thin film and abrupt interface structure growth, ? Accurate control of flow rate, pressure and temperature?can ensure t