块匹配与光流技术在微结构动态特性检测中的应用.pdfVIP

第7卷第5期 纳米技术与精密工程 V01．7 No．5 2009年9月 Nanotechnology and Precision Engineering Sep． 2009 块匹配与光流技术在微结构动态特性检测中的应用 金翠云1，靳世久2，王建林1，栗大超2 (1．北京化工大学信息科学与技术学院，北京100029； 2．天津大学精密测试技术及仪器国家重点实验室，天津300072) 摘要：在微结构动态特性的检测中引入块匹配技术和光流技术．结合微结构的运动特性，分别提出了基于块匹配 技术和基于光流技术的两种微结构二维运动估计算法．利用这两种二维运动估计算法对平面微谐振器做动态特性 分析，均取得了较好的测量结果．对这两种二维运动估计算法在微谐振器动态特性中的测量应用做比较，结果表 明：块匹配算法适合简单的平移运动测量，计算量小，但它要求被测器件在结构上有较为特殊或显著的运动特征区 域；光流算法通过分析单个像素的灰度分布特性来测量被测器件的运动特性．与决匹配法相比，它并不要求被测器 件有较为特殊的运动特征结构．由于光流法以单个像素为计算单位，且其中包含有较多的差分计算，计算过程较为 复杂，因此测量分析所需的时间长． 关键词：光学测量；微结构；动态特性；块匹配；光流技术 中图分类号：TH741 文献标志码：A 文章编号：1672-6030(2009)05．0439-06 Comparative Application of Block Matching and Optical Flow Techniques in Dynamic Characteristics Testing for Micro·Structure JIN Cui．yunl，JIN Shi-jiu2，WANG Jian—linl，LI Da．cha02 (1．CoHege of Information Science ana Technology，Beijing University of Chemical Technology，Beijing 100029，China； 2．State Key Laboratory of Precision Measuring Technology and Instruments，Tianjin Univemity，Tianjin 300072，China) Abstract：Block matching and optical flow techniques were introduced to detect dynamic characteristics of micro—structure．Two—dimensional motion estimation algorithms were presented based on block matching technique and optical flow technique along with motion characteristics of micro—structure，respectively． Measurement results are satisfactory for both methods．Moreover，applications of these two methods in motion characteristics of micro-resonator were compared．Experiment results indicate that block matching algorithm fits simple shifting motion measurement well yet the measurand is required to have special area of motion characteristics．Optical flow algorithm acquires motion characteristics of the measurand throu曲 analyzing gray distribution characteristics of single pixel．The measurand is not required to have special area of motion characteristics yet the optical flow method needs more time to calculate results because its computing unit is the single pixel． Keywords：optical measurement；micr