原子力与光子扫描隧道组合显微镜.pdfVIP

第 25 卷第 8 期 2005 年 8 月 文章编号: 0253-2239(2005)08-1099-6 光学学报 ACT A OPTICA SINICA 原子力与光子扫描隧道组合显微镜铃 Vol. 25.No. 8 August , 2005 吴世法章健潜石简固树李银丽孙伟王晓秋黄玉起宋林峰张毅 (大连理工大学物理系近场光学与纳米技术研究所，大连 116024) 摘要: 介绍了超高分辨光子扫描隧道显微镜(PSTM)的研究历程，为解决第一代(单光束照明)光子扫描隧道显微 镜中存在人为假象和样品光学图像与形貌图像难于分离两个难题，用 π 对称双光束照明方法消假象，用原子力与 光子扫描隧道组合显微镜(AF/PSTM)图像分解方法分离样品光学透过率、折射率与形貌阁像。研制成功新一代 原子力与光子扫描隧道组合显微镜(AF/PSTM)样机。该样机在一次拍捕中已获得两幅原子力显微镜阁像(形貌 与相位)和两幅光学图像(透过惑和折射率) ，有效地减少了假象，分解了样品光学折射率、透过率与形貌图像。 关键词: 显微;超分辨;光子扫描隧道J?.微镜 p 原子力H微镜;扫描近场光学J?.微镜 巾图分类号:丁日742 文献标识码 :A Photon Scanning Tunneling Microscope Combined with Atomic Force Microscope Wu Shifa Zhang Jian Pan Shi Jian Guoshu Li Yinli Sun Wei Wang Xiaoqiu Huang Yuqi Song Linfeng Zhang Yi (lnstitute of Near-Field Optics α饵d Na1协Tech悦。logy ， Depαrtment of Ph仰iC8 ， Dalíαn Unit附rsity of Technology , Daliα忧 116024) Abstract , The development course of Photon Scanning Tunneling Microscopy (PSTM) is introduced. There are two diffícult problems in first generation (with single beam) PSTM , which are the spurious image and the mixture of optical image with topography of sample in PSTM imaging. With the method ofπsymmetry two beams Iighting to eliminate the optical spurious image , and the method of AF / PSTM separating image was used to separate the optical image from topography image of sample. The patent instrument named AF/PSTM (atomic force/photon scanning tunneling microscope) have been successfully developed , with which two AFM images (topography and phase images) and two PSTM images (transmissivity and refractive index images) of sample in once scanning are obtained. The AF/ PSTM can limit the spurious effects due to non-isotropic í1Iumination with single beam and can separate the refractive index image and transmissivity image from ωpography image. Key words: microscopy; superresolution; photo scanning tunneling microscopy (PSTM); atomic force microscope (AFM); scanning near-field optical microsopce (SNOM) 1 引 常规(远场)光学显微成像分辨能力受柿射极限 约，v2 限制，为了在光学显微成像中突