微摩擦力测量装置的设计大学学位论文.doc

毕业设计（论文） 题 目： 微摩擦力测量装置的设计 系 别 航空与机械工程系 专业名称 机械设计制造及其自动化 班级学号 学生姓名 指导教师 二○一四 年 五 月 微摩擦力测量装置的设计 摘要：摩擦现象与人类的生产和生活密切相关，自80年代原子显微镜和摩擦力显微镜问世以后，发现在原子、分子及纳米级尺度下宏观的摩擦规律不再适用，摩擦学研究开始进入微观与宏观结合的新阶段，随着微电子技术的飞速发展而兴起的微电子机械系统(Micro Electron Mechanical System, MEMS)，其零部件的几何尺寸目前一般在微米数量级，他们之间的摩擦介于微观与宏观摩擦之间，称之为微摩擦。本文提出了一种全新的微摩擦测试仪器，在查阅了大量的国内外资料的基础上，详细论述了微摩擦力测试仪的总体设计过程，主要包括转动装置和进给系统的具体设计原理和方法及电机的选用。 关键词:微摩擦力 测试仪 MEMS传感器  MECHANICAL DESIGN OF MICRO FRICTION TESTING BED ABSTRACT: The phenomenon of friction is get well with peoples live and product. From the 1980s, atom-microscope and friction microscope came out, then the scientists found that the macro friction regularity was not suitable at the degree of atom, molecular and nano. This hints that Friction research has entered a new stage in which friction is studied in sub-micro-level. With the micro electronics technology development, the micro E6lectro-mechanical-system (MEMS) has a rapidly developed, whose apparatus geometry dimension at the level of millimeter, the friction of them is between micro and macro. It is called micro-friction. Now the urgent problems needed to be solved in MEMS research is whether the macro friction regularity is suitable for micro-friction phenomena and what degree is the dimension of friction component in that area of micro-friction. Because of the development of MEMS, the explicit principle of micro friction is needed urgently, It has many practical need in micro-friction research. Under the guide of professor Liu Wenguang ,I looked up many abroadand native essays and did many experimentation，a new micro friction surveyors apparatus came out, it have many advantages such as high measure precision，cheaper than others products，reliability function and so on. This article is focused on the course of designing the apparatus of micro-friction. In this article，the paper describes three parts, th