AZ GXR 601 presentation.pdfVIP

The information contained herein is, as far as we are aware, true and accurate. However, no representations or warranties, either express or implied, whether of merchantable quality, fitness for any particular purpose or of any other nature are hereby made in respect of the information contained in this presentation or the product or products which are the subject of it. In providing this material, no license or other rights, whether express or implied, are given with respect to any existing or pending patent, patent application, trademarks, or other intellectual property right. AZ? GXR-601-46 cps Non-critical, High Throughput I-line photoresists EL, DOF, and Linearity for 3μm Iso/Dense Lines and 3μm Dense Contact Holes AZ, the AZ logo, BARLi, Aquatar, nLOF, Kwik Strip, Klebosol, and Spinfil are registered trademarks and AX, DX, HERB, HiR, MiR, NCD, PLP, Signiflow, SWG, and TARP are trademarks of AZ Electronic Materials. 2 Process Conditions General Processing: Substrate : Primed Si Coat: TEL MARK VIII Ttarget = 2.94μm (emax) Softbake: 90°C / 90sec Exposure : ASML/250, i-line stepper COG reticle Conventional Illumination 0.54NA , 0.50 Sigma Post Exposure Bake : 110°C / 90 sec Develop : TEL MARK VIII : AZ 300MIF / 60 sec Single puddle at 23°C. AZ, the AZ logo, BARLi, Aquatar, nLOF, Kwik Strip, Klebosol, and Spinfil are registered trademarks and AX, DX, HERB, HiR, MiR, NCD, PLP, Signiflow, SWG, and TARP are trademarks of AZ Electronic Materials. 3 Performance Summary 3.0 3.5 3.5 DOF (um) AZ GXR-601 1.5522383 μm Dense C/H 0.7421853 μm Iso L/S 0.8471793 μm Dense L/S Linearity (um)EL (%)DTP (mJ)Feature (CD) AZ, the AZ logo, BARLi, Aquatar, nLOF, Kwik Strip, Klebosol, and Spinfil are registered trademarks and AX, DX, HERB, HiR, MiR, NCD, PLP, Signiflow, SWG, and TARP are trademarks of AZ Electronic Materials. 4 AZ? GXR-601, 46 cps Spin Speed Curve 45767 36938 31633 28337 25783 23817 22185 20924 19827 18000 19500 21000 22500 24000 25500 27000 28500