半導体界统计和R的应用.pptVIP

半导体界统计和R的应用 中芯国际 －良率管理系统 2008-12-13 Content Background R Usage at SMIC Integrated Circuit (IC) Manufacturing Semiconductor Data Flow WAT FT WS/CP WIP (MES, iEMS) Wafer start Fab out Continually Defect inspection and review: inspection tool KLA,compass) review tool: SEM Leica(OM) Continually ADI, AEI, CD,etc measurement called metrology (MES) MET Defect (KLARF) WIP EQ log data Test data Process data Also reliability, memory bit, QC and other data Statisticians at SMIC Price Time to Market Original Yield Ramp Our Mission: R Usage at