AZ EXP 5nXt-15nXT Data Package, Suss I-line-compact.pdf

The information contained herein is, as far as we are aware, true and accurate. However, no representations or warranties, either express or implied, whether of merchantable quality, fitness for any particular purpose or of any other nature are hereby made in respect of the information contained in this presentation or the product or products which are the subject of it. In providing this material, no license or other rights, whether express or implied, are given with respect to any existing or pending patent, patent application, trademarks, or other intellectual property right. AZ? 5nXT / 15nXT Photoresists Negative Acting Thick Resists for Cu RDL, TSV, and other plating and etch applications AZ, the AZ logo, BARLi, Aquatar, nLOF, Kwik Strip, Klebosol, and Spinfil are registered trademarks and AX, DX, HERB, HiR, MiR, NCD, PLP, Signiflow, SWG, and TARP are trademarks of AZ Electronic Materials. 2 MEMS / Ink Jet FT: 30 μm Lift-off TSV / Etch Implant Copper/UBM Plating Gold Plating Solder / Metal Plating FT: 2-10 μm FT: 3-15 μm FT: 5-30 μm FT: 10-30 μm FT: 30 μm DUV TFRH/Implant FT: 3 - 8 μm AZ’s Thick Film Photoresist Roadmap AZ? EXP 100 Materials under development AZ? LExp 600 AZ? 12XT-20PL AZ? 125nXT Series Materials in sampling (all EXP products) Commercialized materials AZ? nLOF Series P4620 AZ? N4000 AZ? TX 1311 VS-01HJ AZ? 9200 AZ? PLP30/40 AZ? 50XT AZ? 5XT AZ? 5nXT / AZ? 15nXT AZ? 40XT-11D AZ? 10XT AZ? EXP TX VS-02HJ Red=Neg, Blue =Pos; nLOF, N4000, 5XT, 5nXT, 15nXT, 12XT, 40XT = chemically amplified; 125nXT = photopolymer; 10XT, 9200, P4620, PLP, 50XT = DNQ AZ, the AZ logo, BARLi, Aquatar, nLOF, Kwik Strip, Klebosol, and Spinfil are registered trademarks and AX, DX, HERB, HiR, MiR, NCD, PLP, Signiflow, SWG, and TARP are trademarks of AZ Electronic Materials. 3 AZ? Electronic Materials Thick Photoresist Product Summary Platform: DNQ = Novolak, CA = Chemically Amplified, PP = Photopolymer Wavelength: Red font in