MEMS微构件动态特性测试的激励技术和方法探究.pdfVIP

2008年 第 22 卷 第5 期 测 试 技 术 学 报 Vol. 22　No. 5　2008 (总第71期) JOURNAL OF TEST AND MEASUREMENT TECHNOLOGY (Sum No. 71) 文章编号: 1671-7449(2008) 05-0377-10 MEMS 微构件动态特性测试的激励技术和方法 X 王晓东 1, 2, 杨　洋2, 佘东生2, 王　涛2, 王立鼎1, 2 ( 1. 大连理工大学 精密与特种加工教育部重点实验室, 辽宁 大连 116024; 2. 辽宁省微纳米技术及系统重点实验室, 辽宁 大连 116024) 摘　要:　在微机电系统(MEMS)微构件动态特性的测试中, 激励是基本环节, 通过激励使微构件振动, 并 测量和分析振动响应信号, 实现对微构件动态特性的测试. 由于MEMS微构件的尺寸小、谐振频率较高, 限 制了传统的激励技术和方法在其动态特性测试中的应用. 目前应用在 MEMS 微构件动态特性测试中的激励 技术和方法, 根据实现激励的方式不同, 归纳为三类: 利用外部场能的激励方法、内部集成激励元件的方法 和基于底座激励的方法, 具体介绍了声波激励、超声激励、静电激励、磁激励、电热激励、光热激励和压电激励 等具体激励方式的原理及其特点, 并对各种激励方法的特点进行了比较和分析. 关键词:　微机电系统微构件; 动态特性的测试; 激励方法 中图分类号:　TH703; TH825　　文献标识码: A Excitat ion Techniques for Test ing of Dynamic Character istics of MEMS Microstructure WANG Xiaodong1, 2, YANG Yang2, SHE Dongsheng2, WANG Tao2, WANG Liding1, 2 ( 1. Key Laboratory for Dalian University of Technology Precision Non-tr aditional Machining of Ministry of Education, Dalian 116024, China; 2. Key Laboratory for Micro/ Nano Technology and System of Liaoning Province , Dalian 116024, China) Abstr act:　The excitation is one of the essent ial techniques for dynamic characterist ic test ing of MEMS microst ructure. T he funct ion of the excitat ion is used to make microstructures vibr ate, and then the dynamic characterist ics of the microstructure can be extr acted by analysis of the response signal. The size of microstr ucture is quite small , and the resonance frequency is much higher than macro structures. Therefore, the t raditional excitat ion methods are not suitable for MEMS dynamic test ing and can not be applied without modificat ion. Accor ding to the excitation modes, the excitat ion techniques used in dynamic characterist ics test ing for MEMS microstr uctures can be classified as three categories, i. e. excitat ion by external field ener gy, integr at ion of excitat ion element on the microstructure, and base excitat ion. T he excitat ion principles and characterist ics of the methods including acoust ic excitat ion, e