新版洁净室基本知识.pdfVIP

WINIFRED AbstractAbstract 概要概要 ? Glossary and definitions 术语和定义 ? Cleanroom standards 洁净室相关标准 ? The principals of how a cleanroom works 洁净室工作原理 ? Contamination control in cleanroom 洁净室的污染控制 ? Cleanroom operation 洁净室设备 Glossary and definitions 术语和定义 Micron: More properly, micrometer; a length equal to one millionth of a meter, often written μm. 微米：长度单位，等于百万分之一米，常用μm表示。 Angstrom (?): Unit of length, 1 ?=1x10-10m, 10000 ?=1 μm 埃(?)：长度单位， 1 埃=1x10-10米, 10000 埃=1微米 HEPA Filter: Acronym for High Efficiency Particulate Air filter, typical filter efficiencies for HEPA filters are 99.997% @ 0.3μm diameter 高效空气微粒过滤器：典型过滤效率为99.997% @ 0.3μm直径粒子 ULPA Filter: Acronym for Ultra-Low Particulate Air filter, typical efficiencies for ULPA filters are 99.999997% @ 0.12μm diameter 超高效空气微粒过滤器：典型过滤效率为99.999997% @ 0.12μm直径粒子 Particulate Contaminants: Solid particles in the 0.01 to 100 μm size range 微粒污染物：大小在0.01 to 100 μm 之间的实心微粒。 Glossary and definitions 术语和定义 AMC: Acronym for Airborne Molecular Contamination, chemical contamination that occurs upon exposure to airborne gases and vapors during product handling, storage and transport. 空气传播分子污染：在产品的搬运、储存和运输过程中暴露在空气传播的气体和 蒸气下所造成的化学污染。 Ion: An atom or group of atoms carry a positive or negative charge as a result of having gained or lost one or more electrons. 离子：得到或失去一个或一个以上电子的带正电荷或负电荷的原子或原子群。 FFU: Acronym for Fan Filter Unit, often with an HEPA/ULPA filter underneath. 风机过滤器单元：配合HEPA或ULPA过滤器使用的一种末端送风过滤系统。 Glossary and definitions 术语和定义 Class: As defined in FED STD 209, international Standard ISO 14644 the number of particles found per volume of air. 洁净度等级：如同联邦标准209和国际标准ISO 14644规定的，单位容积空气中 发现的粒子的数量。 Clean Zoom: A defined space in which the concentration of airborne particles is controlled to met a specified airborne cleanliness class. 洁净区：空气中微粒的数量控制在规定的洁净度等级范围内的特定区域。 Cleanroom: An enclosed area with contr