体硅湿法加工中凸角切削现象的分析 .pdfVIP

学兔兔 第3l卷 第4期 仪 器 仪 表 学 报 Vo1．31 No．4 2010年4月 Chinese Jouinal of Scientific Instrument Apr．2010 体硅湿法加工中凸角切削现象的分析木 张 涵，李伟华 (东南大学MEMS教育部重点实验室 南京 210096) 摘 要：以硅(100)衬底为基础，详细介绍了一种针对体硅湿法加工中各向异性腐蚀带来的凸角切削现象的理论分析方法，指 出了凸角切削现象具有唯一性和方向性的结论。该方法首先对凸角侧边类型进行划分，再利用现有理论资源，对凸角侧边和切 削方向在凸角顶点的折算速率进行严格的数学计算和比较，最终确定腐蚀结束后的形变结构。选择了正五边形以及不规则六 边形为代表，展示了该方法的实现过程，最后给出的模拟和实验结果都证实了该方法的正确有效。 关键词：凸角切削；理论分析；各向异性湿法腐蚀；实验验证 中图分类号：510．10 510．30 文献标识码：A 国家标准学科分类代码：510．3020 Analysis research of undercutting phenomenon in wet anisotropic etching process Zhang Han，Li Weihua (Key Laboratory ofMEMS ofthe Ministry ofEducation，Southeast University，Na ng 210096，China) Abstract：A conclusion that the convex comer undercutting phenomenon during the silicon wet anisotropic etching process has its own directivity has been presented based on detailed investigation of(1 00)faced silicon substrate． Additionally，a theoretical analysis method for forecasting the deformed structure after the etching process has been developed．Firstly，we divide the structure borders into eight different classes according to their relative positions and map each class into a unique undercutting direction．Secondly，based on the existing research findings，the border etching rate，as well as the undercutting directions can be converted into the rate of the comer apex respectively． Comparing the two converting rates shows that the higher rate dominates the final undercutting profile．A regular pen- tagon and a~ansverse stretched hexagon are taken as samples to display the analysis process．Simulation results and experiment results are finally given to prove the validity of this me