Diamond Particles Deposited among NickelCopper Particles in Energy Controlled CH4H2 RF Discharge Plasmas英文文献资料.docVIP

Journal of Surface Engineered Materials and Advanced Technology, 2012, 2, 158-162 /10.4236/jsemat.2012.23025 Published Online July 2012 (http://www.SciRP.org/journal/jsemat) Diamond Particles Deposited among Nickel/Copper Particles in Energy Controlled CH4/H2 RF Discharge Plasmas Junichi Emi, Satoru Iizuka Department of Electrical Engineering, Graduate School of Engineering, Tohoku University, Sendai, Japan. Email: iizuka@ecei.tohoku.ac.jp Received April 20 , 2012; revised May 26 , accepted June 8 , 2012 th th