一种新型MEMS器件中的近场辐射传热现象研究.pdfVIP

第26卷 第2期 传 感 技 术 学 报 V0I．26 No．2 2013年 2月 CHINESEJOURNALOFSENSORSANDACTUATORS Feb．2013 TheNear·FieldRadiativeHeatTransferStudyingofaNovelMEMSDevice FENGChong ，TANGZhen’an ，YUJun ，XUEYanbing (1．SchoolofElectronicScienceandTechnology，DalianUniversityofTechnology，DalianLiaoning116023，China 2．SchoolofElectricalandInformationEngineering，DalianJiaotongUniversity，DalianLiaoning116028，China) Abstract：An ideaofimproving theefficiency ofphotovoltaic devicehasbeen proposedbyusingthenear—field thermalradiationtoimplementathemr ophotovoltaicdevice．Baseonthisidea．anoveldevicewithtwoparalle1free． standingmembraneswasdesignedin thiswork．ThedistancebetweenthetwomembranesiSonemicrometer．The devicewasfabricatedbytheMEMS(MicroElectromechanicalSystem)technology．EachmembranehasaPt (platinum)thin—film resistorSO thatthemembranecanbeheated toatemperatureaboveambientandthe temperaturecanbedetected simultaneouslyin itsheating．Byheatingthelowermembranewith andwithoutthe near—fieldheattransferfrom theuppermembrane，theheatingpowerdifferenceswereexperimentallymeasuredto evaluatethenear．fieldradiativeheatpower．Thenear．fieldradiativeheattransferbetweenthetwomembraneswas conformedbythattheradiativeheatpowerintheexperimentwaslargerthanthatofblackbodyradiationunderthe sametemperature condition．Andwhen theuppermembraneworkedasahotemitterand itstemperaturewas 317．2K．the lowermembranetemperaturewould increaserfom 293 K to294．2 K by thenearfield thermal radiation．whichmakesthermoelectricconversionpossible． Keywords：MEMS：device；near．fieldradiation；heattransfer EEACC：2575；8540 doi：10．3969／j．issn．1004-1699．2013．02．006 一 种新型MEMS器件中的近场辐射传热现象研究 冯 冲 ，唐祯安 ，余 隽 ，薛严冰 (1．大连理工大学 ，电子科学与技术学院，辽宁 大连 116023；2．大连交通大学，电气信息学院，辽宁 大连 116028) 摘 要 ：以近场辐射传热方式利用光电器件中的热能制作热光电器件从而提高光电器件转换效率的思想已经被提出。基于 该思想本文设计一种具有面对面平行悬空薄膜的新型MEMS器件 ，两悬空薄膜的间距为 1p,m