Study on a Two-Dimensional Scanning Micro-Mirror and Its Application in a MOEMS Target Detector 英文参考文献.docVIP

Sensors 2010, 10, 6848-6860; doi:10.3390/s100706848 OPEN ACCESS sensors ISSN 1424-8220 /journal/sensors Article Study on a Two-Dimensional Scanning Micro-Mirror and Its Application in a MOEMS Target Detector Chi Zhang *, Zheng You, Hu Huang and Guanhua Li State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instruments and Mechanology, Tsinghua University, Beijing 100084, China; E-Mails: yz-dpi@ (Z.Y.); huanghu08@ (H.H.); lgh@ (G.L.) * Author to whom correspondence should be addressed; E-Mail: c-z04@; Tel.: +86-010 Fax: +86-010 Received: 23 June 2010; in revised form: 16 July 2010 / Accepted: 16 July 2010 / Published: 16 July 2010 Abstract: A two-dimensional (2D) scanning micro-mirror for target detection and measurement has been developed. This new micro-mirror is used in a MOEMS target detector to replace the conventional scanning detector. The micro-mirror is fabricated by MEMS process and actuated by a piezoelectric actuator. To achieve large deflection angles, the micro-mirror is excited in the resonance modes. It has two degrees of freedom and changes the direction of the emitted laser beam for a regional 2D scanning. For the deflection angles measurement, piezoresistors are integrated in the micro-mirror and the deflection angles of each direction can be detected independently and precisely. Based on the scanning micro-mirror and the phase-shift ranging technology, a MOEMS target detector has been developed in a size of 90 mm × 35 mm × 50 mm. The experiment shows that the target can be detected in the scanning field and the relative range and orientation can be measured by the MOEMS target detector. For the target distance up to 3 m with a field of view about 20o × 20o, the measurement resolution is about 10.2 cm in range, 0.15o in the horizontal direction and 0.22o in the vertical directio