Support Loss and Q Factor Enhancement for a Rocking Mass Microgyroscope 英文参考文献.docVIP

Sensors 2011, 11, 9807-9819; doi:10.3390/s111009807 OPEN ACCESS sensors ISSN 1424-8220 /journal/sensors Article Support Loss and Q Factor Enhancement for a Rocking Mass Microgyroscope Xiong Wang, Dingbang Xiao *, Zelong Zhou, Xuezhong Wu, Zhihua Chen and Shengyi Li School of Mechanical Engineering and Automation, National University of Defense Technology, Changsha, Hunan 410073, China; E-Mails: wangxiong0081@ (X.W.); zhouzelong2005@163.com (Z.Z.); xzwu@ (X.W.); czhnudt804@163.com (Z.C.); syli@ (S.L.) * Author to whom correspondence should be addressed; E-Mail: dingbangxiao@; Tel.: +86-731-8457-6373; Fax: +86-731-8457-4963. Received: 15 September 2011; in revised form: 10 October 2011 / Accepted: 17 October 2011 / Published: 19 October 2011 Abstract: A rocking mass gyroscope (RMG) is a kind of vibrating mass gyroscope with high sensitivity, whose driving mode and sensing mode are completely uniform. MEMS RMG devices are a research hotspot now because they have the potential to be used in space applications. Support loss is the dominant energy loss mechanism influencing their high sensitivity. An accurate analytical model of support loss for RMGs is presented to enhance their Q factors. The anchor type and support loss mechanism of an RMG are analyzed. Firstly, the support loads, powers flowing into support structure, and vibration energy of an RMG are all developed. Then the analytical model of support loss for the RMG is developed, and its sensitivities to the main structural parameters are also analyzed. High-Q design guidelines for rocking mass microgyroscopes are deduced. Finally, the analytical model is validated by the experimental data and the data from the existing literature. The thicknesses of the prototypes are reduced from 240 μm to 60 μm, while Q factors increase from less than 150 to more than 800. The derived model is general and applicable to various beam reson