Thermal Actuation Based 3-DoF Non-Resonant Microgyroscope Using MetalMUMPs 英文参考文献.docVIP

Sensors 2009, 9, 2389-2414; doi:10.3390/OPEN ACCESS sensors ISSN 1424-8220 /journal/sensors Article Thermal Actuation Based 3-DoF Non-Resonant Microgyroscope Using MetalMUMPs Rana Iqtidar Shakoor 1,*, Shafaat Ahmed Bazaz 2 , Michael Kraft 3, Yongjun Lai 4 and Muhammad Masood ul Hassan 1 1 Department of Chemical and Materials Engineering, Pakistan Institute of Engineering and Applied Sciences, Islamabad, Pakistan 2 Faculty of Electronics Engineering, GIK Institute of Engineering and Applied Sciences, Topi, NWFP, Pakistan 3 School of Electronics and Computer Science, Southampton University, Highfield, Bld 86, 2033, Southampton, UK, SO17 1BJ 4 Department of Mechanical Engineering, Queens University, Kingston, ON, Canada, K7L 3N6 E-Mails: iqtidar@.pk; bazaz@.pk; mk1@ecs.soton.ac.uk; lai@me.queensu.ca; masoodh@.pk. * Author to whom correspondence should be addressed; Tel.: +92-51- 2207381-4; Fax: +92-151-2208070 Received: 21 February 2009; in revised form: 18 March 2009 / Accepted: 30 March 2009 / Published: 1 April 2009 Abstract: High force, large displacement and low voltage consumption are a primary concern for microgyroscopes. The chevron-shaped thermal actuators are unique in terms of high force generation combined with the large displacements at a low operating voltage in comparison with traditional electrostatic actuators. A Nickel based 3-DoF micromachined gyroscope comprising 2-DoF drive mode and 1-DoF sense mode oscillator utilizing the chevron-shaped thermal actuators is presented here. Analytical derivations and finite element simulations are carried out to predict the performance of the proposed device using the thermo-physical properties of electroplated nickel. The device sensitivity is improved by utilizing the dynamical amplification of the oscillation in 2-DoF drive mode using an active-passive mass configuration. A comprehensive theoretical description, dynamics and mechanical design