Carbon Nanotube Integration with a CMOS Process.docVIP

Sensors 2010, 10, 3857-3867; doi:10.3390/s100403857 OPEN ACCESS sensors ISSN 1424-8220 /journal/sensors Article Carbon Nanotube Integration with a CMOS Process Maximiliano S. Perez 1, Betiana Lerner 1,*, Daniel E. Resasco 2, Pablo D. Pareja Obregon 3, Pedro M. Julian 3, Pablo S. Mandolesi 3, Fabian A. Buffa 4, Alfredo Boselli 1 and Alberto Lamagna 1 1 Grupo MEMS, Comision Nacional de Energia Atomica, San Martin 1650, Buenos Aires, Argentina; E-Mails: mperez@.ar (M.S.P.); boselli@.ar (A.B.); alamagna@.ar (A.L.) 2 School of Chemical, Biological and Materials Engineering, University of