Characterization of Thick and Thin Film SiCN for Pressure Sensing at High Temperatures.docVIP

Sensors 2010, 10, 1338-1354; doi:10.3390/s100201338 OPEN ACCESS sensors ISSN 1424-8220 /journal/sensors Article Characterization of Thick and Thin Film SiCN for Pressure Sensing at High Temperatures Alfin Leo 1, Sergey Andronenko 1,?, Ion Stiharu 2,* and Rama B. Bhat 2 1 CONCAVE Research Centre, Department of Mechanical and Industrial Engineering, Concordia University, Montreal, Quebec H3G 1M8, Canada; E-Mail: alfinleo@; sergey.andronenko@ 2 Department of Mechanical and Industrial Engineering, Concordia University, Montreal, Quebec H3G 1M8, Canada; E-Mail: rbhat@encs.concordia.ca ? Cu